Fabrication of site-controlled InGaN quantum dots using reactive-ion etching
نویسنده
چکیده
We adopted the simple top-down etching to fabricate siteand dimension-controlled InGaN quantum dots. Each quantum dot is disk shaped and embedded in a nanoscale pillar. Arrays of nanopillars with varying densities and nanopillar diameters were fabricated from an InGaN/GaN single quantum well using inductivelycoupled plasma reactive-ion etching. Micro-photoluminescence (μ-PL) was used to characterize the emission properties of individual and ensemble of nanopillars. Strong and distinct PL signal of a single nanopillar was observed even at the room temperature. The emission was found to exhibit characteristics from a discrete energy state that is homogeneously broadened. The ensemble of nanopillars exhibited a similar emission linewidth as the single nanopillar, indicating a well controlled quantum dot dimensions and uniformity.
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Strain relaxation and quantum confinement in InGaN/GaN nanoposts
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